검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of H-2 on the etch profile of InP/InGaAsP alloys in Cl-2/Ar/H-2 inductively coupled plasma reactive ion etching chemistries for photonic device fabrication Rommel SL, Jang JH, Lu W, Cueva G, Zhou L, Adesida I, Pajer G, Whaley R, Lepore A, Schellanbarger Z, Abeles JH Journal of Vacuum Science & Technology B, 20(4), 1327, 2002 |
| 2 |
Metamorphic heterojunction bipolar transistors and P-I-N photodiodes on GaAs substrates prepared by molecular beam epitaxy Hoke WE, Lemonias PJ, Kennedy TD, Torabi A, Tong EK, Bourque RJ, Jang JH, Cueva G, Dumka DC, Adesida I, Chang KL, Hsieh KC Journal of Vacuum Science & Technology B, 19(4), 1505, 2001 |