검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Evaluation of the Electrical Asymmetry Effect by spectroscopic measurements of capacitively coupled discharges and silicon thin film depositions Schungel E, Hofmann R, Mohr S, Schulze J, Ropcke J, Czarnetzki U Thin Solid Films, 574, 60, 2015 |
| 2 |
Development of Fast Ionization Wave Discharges at High Pulse Repetition Rates Takashima K, Adamovich IV, Czarnetzki U, Luggenholscher D Plasma Chemistry and Plasma Processing, 32(3), 471, 2012 |
| 3 |
Quenching rate constants for reactions of Ar(4p '[1/2](0), 4p[1/2](0), 4p[3/2](2), and 4p[5/2](2)) atoms with 22 reagent gases Sadeghi N, Setser DW, Francis A, Czarnetzki U, Dobele HF Journal of Chemical Physics, 115(7), 3144, 2001 |
| 4 |
2-Photon Laser-Induced Fluorescence Measurements of Absolute Atomic-Hydrogen Densities and Powder Formation in a Silane Discharge Czarnetzki U, Miyazaki K, Kajiwara T, Muraoka K, Okada T, Maeda M, Suzuki A, Matsuda A Journal of Vacuum Science & Technology A, 12(3), 831, 1994 |