화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Comparison of the main material stream compositions of coal power plant
Bradlo D, Zukowski W, Czuprynski P, Czekaj M
Przemysl Chemiczny, 93(6), 964, 2014
2 Acquisition and choice of method for fractionation of cenospheres from fly ashes
Bradlo D, Zukowski W, Czuprynski P, Witkowski K
Przemysl Chemiczny, 93(7), 1114, 2014
3 Operating high-density plasma sources in a low-density range: Applications to metal etch processes
Czuprynski P, Joubert O, Vallier L, Sadeghi N
Journal of Vacuum Science & Technology A, 17(5), 2572, 1999
4 X-ray photoelectron spectroscopy analyses of metal stacks etched in Cl-2/BCl3 high density plasmas
Czuprynski P, Joubert O, Vallier L, Puttock M, Heitzmann M
Journal of Vacuum Science & Technology B, 16(1), 147, 1998
5 X-ray photoelectron spectroscopy analyses of silicon dioxide contact holes etched in a magnetically enhanced reactive ion etching reactor
Czuprynski P, Joubert O
Journal of Vacuum Science & Technology B, 16(3), 1051, 1998
6 Analyses of the Chemical Topography of Silicon Dioxide Contact Holes Etched in a High-Density Plasma Source
Joubert O, Czuprynski P, Bell FH, Berruyer P, Blanc R
Journal of Vacuum Science & Technology B, 15(3), 629, 1997
7 Efficiency Evaluation of Postetch Metal Stack Anticorrosion Treatments Using Chemical-Analyses by X-Ray Photoelectron-Spectroscopy and Wide Dispersive-X-Ray Fluorescence
Czuprynski P, Joubert O, Heitzmann M, Louis D, Vizioz C, Lajoinie E
Journal of Vacuum Science & Technology B, 15(4), 1000, 1997