검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effects of film reoxidation on the growth and material properties of ultrathin dielectrics grown by rapid thermal nitridation in ammonia D'Emic C, Newbury J, Scerbo C, Copel M, Gordon M Journal of Vacuum Science & Technology B, 26(4), 1382, 2008 |
| 2 |
Nitrogen interface engineering in Al2O3 capacitors for improved thermal stability Kirsch PD, Park DG, Chan KK, D'Emic C, Bruley J, Jammy R Journal of Vacuum Science & Technology B, 22(5), 2462, 2004 |