검색결과 : 1건
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1 |
Spectroscopic ellipsometry studies on hydrogenated amorphous silicon thin films deposited using DC saddle field plasma enhanced chemical vapor deposition system Saha JK, Bahardoust B, Leong K, Gougam AB, Kherani NP, Zukotynski S Thin Solid Films, 519(9), 2863, 2011 |