검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Anisotropic etching of silicon crystals in KOH solution - Part III - Experimental and theoretical shapes for 3D structures micro-machined in (hk0) plates Tellier CR Journal of Materials Science, 33(1), 117, 1998 |
| 2 |
Etch-Stop Techniques for Micromachining Collins SD Journal of the Electrochemical Society, 144(6), 2242, 1997 |