검색결과 : 1건
No. | Article |
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1 |
Atomic force microscope study of amorphous silicon and polysilicon low-pressure chemical-vapor-deposited implanted layers Edrei R, Shauly EN, Hoffman A Journal of Vacuum Science & Technology B, 18(1), 41, 2000 |
No. | Article |
---|---|
1 |
Atomic force microscope study of amorphous silicon and polysilicon low-pressure chemical-vapor-deposited implanted layers Edrei R, Shauly EN, Hoffman A Journal of Vacuum Science & Technology B, 18(1), 41, 2000 |