검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Wet etching of Al2O3 for selective patterning of microstructures using Ar+ ion implantation and H3PO4 Levy P, Bianconi M, Correra L Journal of the Electrochemical Society, 145(1), 344, 1998 |
| No. | Article |
|---|---|
| 1 |
Wet etching of Al2O3 for selective patterning of microstructures using Ar+ ion implantation and H3PO4 Levy P, Bianconi M, Correra L Journal of the Electrochemical Society, 145(1), 344, 1998 |