검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Growth characterization of rapid thermal oxides Lai WH, Li MF, Chan L, Chua TC Journal of Vacuum Science & Technology B, 17(5), 2226, 1999 |
| 2 |
Alteration of Oxidation Behavior of Silicon-Carbide by Aluminum Implantation Du H, Yang Z, Libera M, Wang YC, Davis RF Journal of Materials Science Letters, 14(7), 460, 1995 |
| 3 |
Determining the Wafer Temperature in Atmospheric Thermal Silicon Oxidation Reactors Philipossian A, Soleimani HR Journal of the Electrochemical Society, 142(5), L67, 1995 |
| 4 |
Oxide-Growth at a Si Surface Verdi L, Miotello A, Kelly R Thin Solid Films, 241(1-2), 383, 1994 |