검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Numerical investigation of plasma recovery in plasma source ion implantation Chung KJ, Choe JM, Kim GH, Hwang YS Thin Solid Films, 521, 197, 2012 |
| 2 |
Simulation of Pressure Effects in a Multipulsed Nitrogen Plasma Source Ion-Implantation System Bear MJ, Guillory JU Journal of Vacuum Science & Technology A, 15(4), 1963, 1997 |