검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
Characterization of zirconium nitride films sputter deposited with an extensive range of nitrogen flow rates Farkas N, Zhang G, Ramsier RD, Evans EA, Dagata JA Journal of Vacuum Science & Technology A, 26(2), 297, 2008 |
| 2 |
High-voltage parallel writing on iron nitride thin films Farkas N, Ehrman JD, Evans EA, Ramsier RD, Dagata JA Journal of Vacuum Science & Technology A, 24(4), 1340, 2006 |
| 3 |
SPM oxidation and parallel writing on zirconium nitride thin films Farkas N, Comer JR, Zhang G, Evans EA, Ramsier RD, Dagata JA Journal of Vacuum Science & Technology A, 23(4), 846, 2005 |
| 4 |
Characterization of prototype silicon pitch artifacts fabricated by scanning probe lithography and anisotropic wet etching Chien FSS, Hsieh WF, Gwo S, Jun J, Silver RM, Vladar AE, Dagata JA Journal of Vacuum Science & Technology B, 23(1), 66, 2005 |
| 5 |
Local oxidation of metal and metal nitride films Farkas N, Tokash JC, Zhang G, Evans EA, Ramsier RD, Dagata JA Journal of Vacuum Science & Technology A, 22(4), 1879, 2004 |
| 6 |
The role of subsurface oxygen in the local oxidation of zirconium and zirconium nitride thin films Farkas N, Zhang G, Donnelly KM, Evans EA, Ramsier RD, Dagata JA Thin Solid Films, 447, 468, 2004 |
| 7 |
Nanoscale oxidation of zirconium surfaces: Kinetics and mechanisms Farkas N, Zhang G, Evans EA, Ramsier RD, Dagata JA Journal of Vacuum Science & Technology A, 21(4), 1188, 2003 |
| 8 |
Density variations in scanned probe oxidation Morimoto K, Perez-Murano F, Dagata JA Applied Surface Science, 158(3-4), 205, 2000 |
| 9 |
Delineation of PN Junctions by Scanning-Tunneling-Microscopy Spectroscopy in Air and Ultrahigh-Vacuum Silver RM, Dagata JA, Tseng W Journal of Vacuum Science & Technology A, 13(3), 1705, 1995 |
| 10 |
Device Fabrication by Scanned Probe Oxidation Dagata JA Science, 270(5242), 1625, 1995 |