검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Characterization of the etch rate non-uniformity in a magnetically enhanced reactive ion etcher Buie MJ, Pender JTP, Dahimene M Journal of Vacuum Science & Technology A, 16(3), 1464, 1998 |
| 2 |
Relating Electric-Field Distribution of an Electron-Cyclotron-Resonance Cavity to Dry-Etching Characteristics Ko KK, Pang SW, Dahimene M Journal of Vacuum Science & Technology A, 14(4), 2020, 1996 |
| 3 |
Dependence of Etch Characteristics on Charge Particles as Measured by Langmuir Probe in a Multipolar Electron-Cyclotron-Resonance Source Sung KT, Juan WH, Pang SW, Dahimene M Journal of Vacuum Science & Technology A, 12(1), 69, 1994 |