검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Intrinsic and Passivation-Induced Trench Tapering During Plasma-Etching Hamaguchi S, Dalvie M Journal of the Electrochemical Society, 141(7), 1964, 1994 |
| 2 |
Simulation of Surface-Topography Evolution During Plasma-Etching by the Method of Characteristics Arnold JC, Sawin HH, Dalvie M, Hamaguchi S Journal of Vacuum Science & Technology A, 12(3), 620, 1994 |
| 3 |
Microprofile Simulations for Plasma-Etching with Surface Passivation Hamaguchi S, Dalvie M Journal of Vacuum Science & Technology A, 12(5), 2745, 1994 |