검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Micro-electro-mechanical system fabrication technology applied to large area x-ray image sensor arrays Daniel JH, Krusor B, Apte RB, Mulato M, Van Schuylenbergh K, Lau R, Do T, Street RA, Goredema A, Boils-Boissier DC, Kazmaier PM Journal of Vacuum Science & Technology A, 19(4), 1219, 2001 |