검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Current Capabilities and Limitations of in-Situ Particle Monitors in Silicon Processing Equipment Takahashi KM, Daugherty JE Journal of Vacuum Science & Technology A, 14(6), 2983, 1996 |
| 2 |
Transport and Heating of Small Particles in High-Density Plasma Sources Kilgore MD, Daugherty JE, Porteous RK, Graves DB Journal of Vacuum Science & Technology B, 12(1), 486, 1994 |