검색결과 : 30건
| No. | Article |
|---|---|
| 1 |
ITO/SiOx:H stacks for silicon heterojunction solar cells Herasimenka SY, Dauksher WJ, Boccard M, Bowden S Solar Energy Materials and Solar Cells, 158, 98, 2016 |
| 2 |
Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells Bailly MS, Karas J, Jain H, Dauksher WJ, Bowden S Thin Solid Films, 612, 243, 2016 |
| 3 |
Direct die-to-database electron beam inspection of fused silica imprint templates Resnick DJ, Myron LJ, Thompson E, Hasebe T, Tokumoto T, Yan C, Yamamoto M, Wakamori H, Inoue M, Ainley E, Nordquist KJ, Dauksher WJ Journal of Vacuum Science & Technology B, 24(6), 2979, 2006 |
| 4 |
Effects of etch barrier densification on step and flash imprint lithography Johnson S, Burns R, Kim EK, Dickey M, Schmid G, Meiring J, Burns S, Willson CG, Convey D, Wei Y, Fejes P, Gehoski K, Mancini D, Nordquist K, Dauksher WJ, Resnick DJ Journal of Vacuum Science & Technology B, 23(6), 2553, 2005 |
| 5 |
Image placement issues for ITO-based step and flash imprint lithography templates Nordquist KJ, Ainley ES, Mancini DP, Dauksher WJ, Gehoski KA, Baker J, Resnick DJ, Masnyj Z, Mangat PJS Journal of Vacuum Science & Technology B, 22(2), 695, 2004 |
| 6 |
Fabrication of a surface acoustic wave-based correlator using step-and-flash imprint lithography Cardinale GF, Skinner JL, Talin AA, Brocato RW, Palmer DW, Mancini DP, Dauksher WJ, Gehoski K, Le N, Nordquist KJ, Resnick DJ Journal of Vacuum Science & Technology B, 22(6), 3265, 2004 |
| 7 |
Inspection of templates for imprint lithography Hess HF, Pettibone D, Adler D, Bertsche K, Nordquist KJ, Mancini DP, Dauksher WJ, Resnick DJ Journal of Vacuum Science & Technology B, 22(6), 3300, 2004 |
| 8 |
Repair of step and flash imprint lithography templates Dauksher WJ, Nordquist KJ, Le NV, Gehoski KA, Mancini DP, Resnick DJ, Casoose L, Bozak R, White R, Csuy J, Lee D Journal of Vacuum Science & Technology B, 22(6), 3306, 2004 |
| 9 |
Imprint lithography for integrated circuit fabrication Resnick DJ, Dauksher WJ, Mancini D, Nordquist KJ, Bailey TC, Johnson S, Stacey N, Ekerdt JG, Willson CG, Sreenivasan SV, Schumaker N Journal of Vacuum Science & Technology B, 21(6), 2624, 2003 |
| 10 |
Step and flash imprint lithography template characterization, from an etch perspective Dauksher WJ, Mancini DP, Nordquist KJ, Resnick DJ, Standfast DL, Convey D, Wei Y Journal of Vacuum Science & Technology B, 21(6), 2771, 2003 |