검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Correction of stray-light-induced proximity effect by complementary double exposure in microlithography Kim YC, De Bisschop P, Leunissen LHA, Vandenberghe G Journal of Vacuum Science & Technology B, 24(1), 170, 2006 |
| 2 |
Impact of stray light depending on image quality: An approximation using total integrated scatter Kim YC, De Bisschop P, Vandenberghe G, Van Den Hove L, Cho H, Moon J Journal of Vacuum Science & Technology B, 24(6), 2803, 2006 |