화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Electron-electron interaction induced beam displacement in a multiple electron beam system
Yu ML, Coyle ST, DeVore W, Shamoun B
Journal of Vacuum Science & Technology B, 23(6), 2589, 2005
2 Optimization of microcolumn electron optics for high-current applications
Mankos M, Lee KY, Muray L, Spallas J, Hsu Y, Stebler C, DeVore W, Bullock E, Chang THP
Journal of Vacuum Science & Technology B, 18(6), 3057, 2000
3 High Emittance Electron-Gun for Projection Lithography
Devore W, Berger SD
Journal of Vacuum Science & Technology B, 14(6), 3764, 1996