검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Protection of silicon wafers from alkali contamination during high-temperature processing using electric field Beregovsky M, Klyuch A, Raskin Y, Zinman Y, Shacham-Diamand Y, Deal BE Journal of the Electrochemical Society, 147(10), 3892, 2000 |