검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy Tompkins HG, Gregory RB, Deal PW, Smith SM Journal of Vacuum Science & Technology A, 17(2), 391, 1999 |