화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Infrared molar absorption coefficient of H2O stretching modes in SiO2
Dekkers HFW, Gallo A, Van Elshocht S
Thin Solid Films, 542, 8, 2013
2 The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD
Verlaan V, Verkerk AD, Arnoldbik WM, van der Werf CHM, Bakker R, Houweling ZS, Romijn IG, Borsa DM, Weeber AW, Luxembourg SL, Zeman M, Dekkers HFW, Schropp REI
Thin Solid Films, 517(12), 3499, 2009
3 Requirements of PECVD SiNx : H layers for bulk passivation of mc-Si
Dekkers HFW, De Wolf S, Agostinelli G, Duerinckx F, Beaucarne G
Solar Energy Materials and Solar Cells, 90(18-19), 3244, 2006
4 Very low surface recombination velocities on p-type silicon wafers passivated with a dielectric with fixed negative charge
Agostinelli G, Delabie A, Vitanov P, Alexieva Z, Dekkers HFW, De Wolf S, Beaucarne G
Solar Energy Materials and Solar Cells, 90(18-19), 3438, 2006
5 High temperature line electrode assembly for continuous substrate flow VHFPECVD
Schade K, Stahr F, Kuske J, Rohlecke S, Steinke O, Stephan U, Dekkers HFW
Thin Solid Films, 502(1-2), 59, 2006