화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Analysis of trap-assisted tunneling in vertical Si homo-junction and SiGe hetero-junction Tunnel-FETs
Vandooren A, Leonelli D, Rooyackers R, Hikavyy A, Devriendt K, Demand M, Loo R, Groeseneken G, Huyghebaert C
Solid-State Electronics, 83, 50, 2013
2 Temperature and RF Current Sensor Wafers for Plasma Etching
Milenin AP, Demand M, Boullart W, Arleo P
Journal of the Electrochemical Society, 159(1), H5, 2012
3 Achieving low-V-T Ni-FUSICMOS via lanthanide incorporation in the gate stack
Veloso A, Yu HY, Lauwers A, Chang SZ, Adelmann C, Onsia B, Demand M, Brus S, Vrancken C, Singanamalla R, Lehnen P, Kittl J, Kauerauf T, Vos R, O'Sullivan BJ, Van Elshocht S, Mitsuhashi R, Whittemore G, Yin KM, Niwa M, Hoffmann T, Absil P, Jurczak M, Biesemans S
Solid-State Electronics, 52(9), 1303, 2008
4 Profile control of novel non-Si gates using BCl3/N-2 plasma
Shamiryan D, Paraschiv V, Eslava-Fernandez S, Demand M, Baklanov M, Beckx S, Boullart W
Journal of Vacuum Science & Technology B, 25(3), 739, 2007