검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real-time substrate misalignment monitor and automatic recalibration Hosokawa A, Demaray E, Mullapudi R, Inagawa M Journal of Vacuum Science & Technology A, 16(3), 1921, 1998 |
| 2 |
Structure engineering for hillock-free pure aluminum sputter deposition for gate and source line fabrication in active-matrix liquid crystal displays Voutsas AT, Hibino Y, Pethe R, Demaray E Journal of Vacuum Science & Technology A, 16(4), 2668, 1998 |