검색결과 : 1건
No. | Article |
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1 |
High-Temperature Kinetic-Study for the Reactive Ion Etching of InP in BCl3/Ar/O-2 Demos AT, Fogler HS, Fournier J, Elta ME AIChE Journal, 41(3), 658, 1995 |
No. | Article |
---|---|
1 |
High-Temperature Kinetic-Study for the Reactive Ion Etching of InP in BCl3/Ar/O-2 Demos AT, Fogler HS, Fournier J, Elta ME AIChE Journal, 41(3), 658, 1995 |