| 1 |
Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
Iwashita S, Denpoh K, Kagaya M, Kikuchi T, Noro N, Hasegawa T, Moriya T, Uedono A
Thin Solid Films, 660, 865, 2018 |
| 2 |
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF4 plasmas
Ventzek PLG, Denpoh K
Journal of Vacuum Science & Technology A, 27(2), 287, 2009 |
| 3 |
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled plasmas in argon
Denpoh K, Ventzek PLG
Journal of Vacuum Science & Technology A, 26(6), 1415, 2008 |
| 4 |
Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet
Moriya T, Nagaike H, Denpoh K, Morimoto T, Aomori M, Kawaguchi S, Shimada M, Okuyama K
Journal of Vacuum Science & Technology B, 22(4), 1688, 2004 |
| 5 |
Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion-neutral reactive collisions
Denpoh K, Nanbu K
Journal of Vacuum Science & Technology A, 16(3), 1201, 1998 |
