검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Surface modification of silicon-containing fluorocarbon films prepared by plasma-enhanced chemical vapor deposition Jin YY, Desta Y, Goettert J, Lee GS, Ajmera PK Journal of Vacuum Science & Technology A, 23(4), 666, 2005 |
| 2 |
Graphite-based x-ray masks for deep and ultradeep x-ray lithography Coane P, Giasolli R, De Caro F, Mancini DC, Desta Y, Gottert J Journal of Vacuum Science & Technology B, 16(6), 3618, 1998 |