검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dependence of the Self-Bias on the Plasma Parameters and on the Electrode Areas in RF Plasma Reactors Deutsch R, Schwarz J Plasma Chemistry and Plasma Processing, 16(4), 499, 1996 |
| 2 |
Influence of the Ratio of the Electron Temperatures at the Electrodes on the Current Oscillations in a Radiofrequency Plasma Reactor Deutsch R, Erz U, Pohle M, Rauchle E, Schwarz J Journal of Vacuum Science & Technology A, 12(5), 2936, 1994 |