검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Transparent conducting oxide films of group V doped titania prepared by aqueous chemical solution deposition Elen K, Capon B, De Dobbelaere C, Dewulf D, Peys N, Detavernier C, Hardy A, Van Bael MK Thin Solid Films, 555, 33, 2014 |
| 2 |
Gadolinium -niobates and -tantalates: Amorphous High-k Materials by Aqueous CSD Dewulf D, Hardy A, Van Elshocht S, De Dobbelaere C, Wang WC, Badylevich M, Afanas'ev VV, De Gendt S, Van Bael MK Journal of the Electrochemical Society, 159(6), G75, 2012 |
| 3 |
Properties of Ultrathin High Permittivity (Nb1-xTax)(2)O-5 Films Prepared by Aqueous Chemical Solution Deposition Hardy A, Van Elshocht S, Dewulf D, Clima S, Peys N, Adelmann C, Opsomer K, Favia P, Bender H, Hoflijk I, Conard T, Franquet A, Van den Rul H, Kittl JA, De Gendt S, Van Bael MK, Mullens J Journal of the Electrochemical Society, 157(1), G13, 2010 |
| 4 |
Atomic Layer Deposition of Gd-Doped HfO2 Thin Films Adelmann C, Tielens H, Dewulf D, Hardy A, Pierreux D, Swerts J, Rosseel E, Shi X, Van Bael MK, Kittl JA, Van Elshocht S Journal of the Electrochemical Society, 157(4), G105, 2010 |
| 5 |
Alternative high-k dielectrics for semiconductor applications Van Elshocht S, Adelmann C, Clima S, Pourtois G, Conard T, Delabie A, Franquet A, Lehnen P, Meersschaut J, Menou N, Popovici M, Richard O, Schram T, Wang XP, Hardy A, Dewulf D, Van Bael MK, Lehnen P, Blomberg T, Pierreux D, Swerts J, Maes JW, Wouters DJ, De Gendt S, Kittl JA Journal of Vacuum Science & Technology B, 27(1), 209, 2009 |
| 6 |
The effect of added salts on the optical properties of water for high index immersion lithography fluids Taylor JC, Costner EA, Goh S, Wojtczak W, Dewulf D, Willson CG Journal of Vacuum Science & Technology B, 26(2), 506, 2008 |