검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Physical and electrical properties of metal gate electrodes on HfO2 gate dielectrics Schaeffer JK, Samavedam SB, Gilmer DC, Dhandapani V, Tobin PJ, Mogab J, Nguyen BY, White BE, Dakshina-Murthy S, Rai RS, Jiang ZX, Martin R, Raymond MV, Zavala M, La LB, Smith JA, Garcia R, Roan D, Kottke M, Gregory RB Journal of Vacuum Science & Technology B, 21(1), 11, 2003 |