검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thin film deposition of Mo and Mo-compounds by PECVD from Mo(CO)(6) and MoF6 as precursors: characterization of films and thermodynamic analysis Di Giuseppe G, Selman JR Journal of Electroanalytical Chemistry, 559, 31, 2003 |