검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Wet cleaning and surface characterization of Si1-xGex virtual substrates after a CMP step Abbadie A, Hartmann JM, Besson P, Rouchon D, Martinez E, Holliger P, Di Nardo C, Campidelli Y, Billon T Applied Surface Science, 254(21), 6793, 2008 |
| 2 |
High-temperature growth of very high germanium content SiGe virtual substrates Bogumilowicz Y, Hartmann JM, Di Nardo C, Holliger P, Papon AM, Rolland G, Billon T Journal of Crystal Growth, 290(2), 523, 2006 |
| 3 |
Engineering strained silicon on insulator wafers with the Smart Cut (TM) technology Ghyselen B, Hartmann JM, Ernst T, Aulnette C, Osternaud B, Bogumilowicz Y, Abbadie A, Besson P, Rayssac O, Tiberj A, Daval N, Cayrefourq I, Fournel F, Moriceau H, Di Nardo C, Andrieu F, Paillard V, Cabie M, Vincent L, Snoeck E, Cristiano F, Rocher A, Ponchet A, Claverie A, Boucaud P, Semeria MN, Bensahel D, Kernevez B, Mazure C Solid-State Electronics, 48(8), 1285, 2004 |