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| No. | Article |
|---|---|
| 1 |
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Winston D, Cord BM, Ming B, Bell DC, DiNatale WF, Stern LA, Vladar AE, Postek MT, Mondol MK, Yang JKW, Berggren KK Journal of Vacuum Science & Technology B, 27(6), 2702, 2009 |