검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Plasma nitridation of thin Si layers for GaAs dielectrics Wang Z, Diatezua DM, Park DG, Chen Z, Morkoc H, Rockett A Journal of Vacuum Science & Technology B, 17(5), 2034, 1999 |
| 2 |
Si3N4 on GaAs by direct electron cyclotron resonance plasma assisted nitridation of Si layer in Si/GaAs structure Diatezua DM, Wang Z, Park D, Chen Z, Rockett A, Morkoc H Journal of Vacuum Science & Technology B, 16(2), 507, 1998 |
| 3 |
Control of Radio-Frequency-Plasma Process to Improve the Reproducibility of Silicon Oxynitride Thin-Film Preparation Diatezua DM, Thiry PA, Caudano R Journal of Vacuum Science & Technology A, 13(4), 2099, 1995 |