검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Impact of metal etch residues on etch species density and uniformity Dictus D, Shamiryan D, Paraschiv V, Boullart W, De Gendt S, Vinckier C Journal of Vacuum Science & Technology B, 28(4), 789, 2010 |
| 2 |
Unusual Modification of CuCl or CuBr Films by He Plasma Exposure Resulting in Nanowire Formation Dictus D, Baklanov MR, Pikulev V, De Gendt S, Vinckier C, Boullart W, Vanhaelemeersch S Langmuir, 26(3), 2014, 2010 |
| 3 |
Using ellipsometry for assessment of TiN surface roughness after plasma etch Shamiryan D, Paraschiv V, Dictus D, Baklanov MR, Beckx S, Boullart W Journal of the Electrochemical Society, 155(2), H108, 2008 |
| 4 |
Wet etch characteristics of hafnium silicate layers Claes M, Paraschiv V, Dictus D, Conard T, Delabie A, Van Elshocht S, Zhao C, Everaert JL, Boullart W, Vanhaelemeersch S, De Gendt S Journal of the Electrochemical Society, 153(4), F60, 2006 |
| 5 |
Influence of crystallographic orientation on dry etch properties of TiN Dictus D, Shamiryan D, Paraschiv V, Boullart W, De Gendt S, Vanhaelemeersch S Journal of Vacuum Science & Technology B, 24(5), 2472, 2006 |