검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low-k film damage-resistant CO chemistry-based ash process for low-k/Cu interconnection in flash memory devices Lee J, Park WJ, Kim DH, Choi J, Shin K, Chung I Thin Solid Films, 517(14), 3847, 2009 |
| No. | Article |
|---|---|
| 1 |
Low-k film damage-resistant CO chemistry-based ash process for low-k/Cu interconnection in flash memory devices Lee J, Park WJ, Kim DH, Choi J, Shin K, Chung I Thin Solid Films, 517(14), 3847, 2009 |