검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study on the characteristics of TiAlN thin film deposited by atomic layer deposition method Koo J, Lee JW, Doh T, Kim Y, Kim YD, Jeon H Journal of Vacuum Science & Technology A, 19(6), 2831, 2001 |
| No. | Article |
|---|---|
| 1 |
Study on the characteristics of TiAlN thin film deposited by atomic layer deposition method Koo J, Lee JW, Doh T, Kim Y, Kim YD, Jeon H Journal of Vacuum Science & Technology A, 19(6), 2831, 2001 |