검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Loss of implanted heavy elements during annealing of ultra-shallow ion-implanted silicon: The complete picture Chan TK, Koh SY, Fang V, Markwitz A, Osipowicz T Applied Surface Science, 314, 322, 2014 |
| 2 |
Controlling surface shallow junction depth by a rapid thermal annealing process with low ambient pressure Huang YJ, Liu CC, Lo KY, Chu SY Applied Surface Science, 257(7), 2494, 2011 |