| 1 |
Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching
Osipov AA, Iankevich GA, Alexandrov SE
Plasma Chemistry and Plasma Processing, 40(1), 423, 2020 |
| 2 |
Plasma etched c-Si wafer with proper pyramid-like nanostructures for photovoltaic applications
Addonizio ML, Antonaia A, Fusco L
Applied Surface Science, 467, 143, 2019 |
| 3 |
Origin of the dry etch damage in the short-channel oxide thin-film transistors for high resolution display application
Choi JH, Yang JH, Pi JE, Hwang CY, Kim HO, Hwang CS
Thin Solid Films, 674, 71, 2019 |
| 4 |
Surface chemistry of thermal dry etching of cobalt thin films using hexafluoroacetylacetone (hfacH)
Zhao J, Konh M, Teplyakov A
Applied Surface Science, 455, 438, 2018 |
| 5 |
Ultra-low rate dry etching conditions for fabricating normally-off field effect transistors on AlGaN/GaN heterostructures
Kim ZS, Lee HS, Na J, Bae SB, Nam E, Lim JW
Solid-State Electronics, 140, 12, 2018 |
| 6 |
Effects of 3D microlens transfer into fused silica substrate by CF4/O-2 dry etching
Grigaliunas V, Jucius D, Lazauskas A, Andrulevicius M, Sakaliuniene J, Abakeviciene B, Kopustinskas V, Smetona S, Tamulevicius S
Applied Surface Science, 393, 287, 2017 |
| 7 |
Dry etching of palladium thin films in high density plasmas of CH3OH/Ar, C2H5OH/Ar, CH4/Ar, and CH4/O-2/Ar gas mixtures
Lee JY, Choi JS, Cho DH, Hwang SM, Chung CW
Thin Solid Films, 636, 325, 2017 |
| 8 |
Different methods to alter surface morphology of high aspect ratio structures
Leber M, Shandhi MMH, Hogan A, Solzbacher F, Bhandari R, Negi S
Applied Surface Science, 365, 180, 2016 |
| 9 |
Fabrication of hierarchical anti-reflective structures using polystyrene sphere lithography on an as-cut p-Si substrate
Chou YY, Lee KT, Lee YC
Applied Surface Science, 377, 81, 2016 |
| 10 |
On the emitter formation in nanotextured silicon solar cells to achieve improved electrical performances
Kafle B, Schon J, Fleischmann C, Werner S, Wolf A, Clochard L, Duffy E, Hofmann M, Rentsch J
Solar Energy Materials and Solar Cells, 152, 94, 2016 |
