화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks
Sossna E, Degen A, Rangelow IW, Drzik M, Hudek P, Tiwald TE, Woollam JA
Journal of Vacuum Science & Technology B, 19(6), 2665, 2001
2 Directly sputtered stress-compensated carbon protective layer for silicon stencil masks
Hudek P, Hrkut P, Drzik M, Kostic I, Belov M, Torres J, Wasson J, Wolfe JC, Degen A, Rangelow IW, Voigt J, Butschke J, Letzkus F, Springer R, Ehrmann A, Kaesmaier R, Kragler K, Mathuni J, Haugeneder E, Loschner H
Journal of Vacuum Science & Technology B, 17(6), 3127, 1999
3 Retrieving the size distribution of microparticles by scanning the diffraction halo with a mobile ring-gap detector
Kocifaj M, Drzik M
Journal of Aerosol Science, 28(5), 797, 1997