검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Diagnostic study of argon and oxygen mixtures in dual-frequency capacitively coupled plasmas using quadrupole mass spectrometer Jiang XZ, Li WL, Wumaier TED, Yao HB Chemical Physics Letters, 730, 472, 2019 |
| 2 |
Growth of few-layer graphene on SiC at low temperature with the fluorocarbon plasma pre-etching Xu YJ, Wu XM, Ye C, Deng YH, Chen T, Ge SB Thin Solid Films, 527, 65, 2013 |