검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Use of polymethylmethacrylate for pattern transfer by ion beam etching: Improvement of etching homogeneity and patterning quality Koval Y, Borzenko T, Dubonos S Journal of Vacuum Science & Technology B, 21(5), 2217, 2003 |
| No. | Article |
|---|---|
| 1 |
Use of polymethylmethacrylate for pattern transfer by ion beam etching: Improvement of etching homogeneity and patterning quality Koval Y, Borzenko T, Dubonos S Journal of Vacuum Science & Technology B, 21(5), 2217, 2003 |