화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Assessing the performance of two-dimensional dopant profiling techniques
Duhayon N, Eyber P, Fouchier M, Clarysee T, Vandervorst W, Alvarez D, Schoemann S, Ciappa M, Stangoni M, Fichtner W, Formanek P, Kittler M, Raineri V, Giannazzo F, Goghero D, Rosenwaks Y, Shikler R, Saraf S, Sadewasser S, Barreau N, Glatzel T, Verheijen M, Mentink SAM, von Sprekelsen M, Maltezopoulos T, Wiesendanger R, Hellemans L
Journal of Vacuum Science & Technology B, 22(1), 385, 2004
2 Carrier spilling revisited: On-bevel junction behavior of different electrical depth profiling techniques
Clarysse T, Eyben P, Duhayon N, Xu MW, Vandervorst W
Journal of Vacuum Science & Technology B, 21(2), 729, 2003
3 Bias-induced junction displacements in scanning spreading resistance microscopy and scanning capacitance microscopy
Eyben P, Duhayon N, Clarysse I, Vandervorst W
Journal of Vacuum Science & Technology B, 21(2), 737, 2003
4 Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling
Eyben P, Xu M, Duhayon N, Clarysse T, Callewaert S, Vandervorst W
Journal of Vacuum Science & Technology B, 20(1), 471, 2002
5 Detailed study of scanning capacitance microscopy on cross-sectional and beveled junctions
Duhayon N, Clarysse T, Eyben P, Vandervorst W, Hellemans L
Journal of Vacuum Science & Technology B, 20(2), 741, 2002