검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic force microscopy investigation of a-C : H films prepared by plasma enhanced chemical vapor deposition for inertial confinement fusion experiments Dumay B, Finot E, Theobald M, Legaie O, Baclet P, Durand J, Goudonnet JP Journal of Vacuum Science & Technology A, 20(2), 366, 2002 |