검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Diagnostic in CVD processes by IR pyrometry Gasqueres C, Duminica FD, Maury F Chemical Engineering and Processing, 47(3), 383, 2008 |
| 2 |
Diagnostic in TCOs CVD processes by IR pyrometry Maury F, Duminica FD Thin Solid Films, 515(24), 8619, 2007 |
| 3 |
Pyrosol deposition of anatase TiO2 thin films starting from Ti(O-i Pr)(4)/acetylacetone solutions Duminica FD, Maury F, Abisset S Thin Solid Films, 515(20-21), 7732, 2007 |
| 4 |
Iron thin films from Fe(CO)(5) and FeCp2/H2O under atmospheric pressure Senocq F, Duminica FD, Maury F, Delsol T, Vahlas C Journal of the Electrochemical Society, 153(12), G1025, 2006 |
| 5 |
MOCVD of Cr-3(C, N)(2) and CrSixCy films - I. Growth and characterization Gasqueres C, Duminica FD, Maury F, Ossola F Journal of the Electrochemical Society, 152(8), G651, 2005 |
| 6 |
MOCVD of Cr-3(C,N)(2) and CrSixCy films II. Properties as conducting Cu diffusion barriers Gasqueres C, Duminica FD, Maury F Journal of the Electrochemical Society, 152(12), G907, 2005 |
| 7 |
Chemical vapor deposition of Cr-based thin films as diffusion barriers in copper metallization Maury F, Gasqueres C, Duminica FD, Ossola F Materials Science Forum, 426-4, 3439, 2003 |