검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of oxygen at the Cu-SiCxNy interface on electromigration performance of interconnect structures Liniger EG, Dziobkowski C Thin Solid Films, 513(1-2), 295, 2006 |
| 2 |
Effects of argon addition to a platinum dry etch process Milkove KR, Coffin JA, Dziobkowski C Journal of Vacuum Science & Technology A, 16(3), 1483, 1998 |
| 3 |
Fluorine Diffusion from Fluorosilicate Glass Shapiro MJ, Matsuda T, Nguyen SV, Parks C, Dziobkowski C Journal of the Electrochemical Society, 143(7), L156, 1996 |