검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements Meeks E, Larson RS, Ho P, Apblett C, Han SM, Edelberg E, Aydil ES Journal of Vacuum Science & Technology A, 16(2), 544, 1998 |