화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Reaction of the fluorine atom and molecule with the hydrogen-terminated Si(111) surface
Morikawa Y, Kubota K, Ogawa H, Ichiki T, Tachibana A, Fujimura S, Horiike Y
Journal of Vacuum Science & Technology A, 16(1), 345, 1998
2 Molecular-Dynamics Simulations of Reactions of Hyperthermal Fluorine-Atoms with Fluorosilyl Adsorbates on the Si(100)-(2X1) Surface
Galijatovic A, Darcy A, Acree B, Fullbright G, Mccormac R, Green B, Krantzman KD, Schoolcraft TA
Journal of Physical Chemistry, 100(22), 9471, 1996