검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Electron irradiation-enhanced water and hydrocarbon adsorption in EUV lithography devices Al-Ajlony A, Kanjilal A, Catalfano M, Harilal SS, Hassanein A Applied Surface Science, 289, 358, 2014 |
| 2 |
Cleaning technology for EUV multilayer mirror using atomic hydrogen generated with hot wire Motai K, Oizumi H, Miyagaki S, Nishiyama I, Izumi A, Ueno T, Namiki A Thin Solid Films, 516(5), 839, 2008 |
| 3 |
Novel anionic photoacid generators (PAGs) and corresponding PAG bound polymers Wang MX, Gonsalves KE, Yueh W, Roberts JM Macromolecular Rapid Communications, 27(18), 1590, 2006 |
| 4 |
X-ray generation from fs laser heated Xe clusters Kondo K, Mori M, Shiraishi T Applied Surface Science, 197, 138, 2002 |
| 5 |
Debris from tape-target irradiated with pulsed YAG laser Azuma H, Nishimura Y, Sakata A, Takeuchi A Applied Surface Science, 197, 224, 2002 |
| 6 |
Extreme ultraviolet lithography mask patterning and printability studies with a Ta-based absorber Mangat PJS, Hector SD, Thompson MA, Dauksher WJ, Cobb J, Cummings KD, Mancini DP, Resnick DJ, Cardinale G, Henderson C, Kearney P, Wedowski M Journal of Vacuum Science & Technology B, 17(6), 3029, 1999 |