검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system Kelly PJ, Arnell RD Journal of Vacuum Science & Technology A, 16(5), 2858, 1998 |
| No. | Article |
|---|---|
| 1 |
Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system Kelly PJ, Arnell RD Journal of Vacuum Science & Technology A, 16(5), 2858, 1998 |