검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of pattern geometrical effect on line end shortening in x-ray lithography Yi M, Seo Y, Seo E, Yang J, Lee K, Choi BK, Kim O Journal of Vacuum Science & Technology B, 16(6), 3515, 1998 |
| No. | Article |
|---|---|
| 1 |
Characterization of pattern geometrical effect on line end shortening in x-ray lithography Yi M, Seo Y, Seo E, Yang J, Lee K, Choi BK, Kim O Journal of Vacuum Science & Technology B, 16(6), 3515, 1998 |